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• ¹ÝµµÃ¼»ê¾÷ ½ÃÀå ¹× ÅõÀÚ µ¿Çâ°ú Àü¸Á • ¹ÝµµÃ¼ Àåºñ¡¤ºÎǰ»ê¾÷ µ¿Çâ°ú Àü¸Á • ±¹³» ¹ÝµµÃ¼ Àåºñ¡¤ºÎǰ¾÷üÀÇ ±Û·Î¹úÈ Á¦¾à¿äÀΰú ÇØ°á°úÁ¦ |
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¹ÝµµÃ¼ Àü°øÁ¤ Àåºñ (Hardware) |
¹ÝµµÃ¼ Àü°øÁ¤Àåºñ Overview |
• ¹ÝµµÃ¼ Àü°øÁ¤(Front-End Process) ¼Ò°³ • ¹ÝµµÃ¼ Àü°øÁ¤ Àåºñ(Front-End Equipment) ¼Ò°³ ; Photo, Etch, Diffusion, Ion Implant, ThinFilm (CVD & PVD), Cleaning & CMP Àåºñ ¼Ò°³ |
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¹ÝµµÃ¼ Àü°øÁ¤ Àåºñ ±¸Á¶ ¹× µ¿ÀÛ ¿ø¸® |
• ¹ÝµµÃ¼ Àü°øÁ¤ Àåºñ ±¸Á¶ ¹× µ¿ÀÛ ¿ø¸® ; Photo, Etch, Diffusion, Ion Implant, ThinFilm, Cleaning & CMP Àåºñ ±¸Á¶ ¹× µ¿ÀÛ ¿ø¸® |
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¹ÝµµÃ¼Àåºñ ÁÖ¿ä ±¸¼ºÇ° (ºÎǰ) ±¸Á¶ ¹× µ¿ÀÛ ¿ø¸® |
• ¹ÝµµÃ¼ Àåºñ ÁÖ¿ä ±¸¼ºÇ°(ºÎǰ) ±¸Á¶ ¹× µ¿ÀÛ ¿ø¸® ; RF Generator & Matcher, Vacuum Pump & Gauge, Heater, ESC, MFC, Flowmeter, Chemical Concentration Sensor, Valve, Filter, Scrubber, Chiller etc. |
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¹ÝµµÃ¼ Àåºñ (System : Software) |
¹ÝµµÃ¼Àåºñ Control Software °³¿ä |
• ¹ÝµµÃ¼ Àåºñ Control Software °³¿ä ; ¹ÝµµÃ¼ ÀåºñÀÇ Æ¯¼º (ÀÏ¹Ý »ê¾÷Àåºñ¿ÍÀÇ Â÷ÀÌÁ¡) ¹ÝµµÃ¼ Á¦Á¶ Àåºñ ¹× ¼³ºñ Software °³³ä ¹× Á¾·ù (¹ÝµµÃ¼ Àåºñ Control SoftwareÀÇ ¹ßÀü»ç |
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• ¹ÝµµÃ¼Àåºñ Control SoftwareÀÇ ±¸Á¶ ¹× µ¿ÀÛ¿ø¸® ; CTMC °³³ä Module controllerÀÇ ±¸Á¶¿Í µ¿ÀÛ ¿ø¸® ¹ÝµµÃ¼Àåºñ Control SoftwareÀÇ °³¹ß °úÁ¤ ¹ÝµµÃ¼Àåºñ Control SoftwareÀÇ Maintenance Equipment to Factory Comunication |
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• ¹ÝµµÃ¼Àåºñ SoftwareÀÇ ÇѰè¿Í °úÁ¦ ; Á¦¾î»êÆ÷¿Í °øÁ¤ ¹× Àåºñ dataÀÇ Ã³¸® ¹æ¹ý CTCM°ú TTTM Diagnosis of equipment |
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